JPH0322061U - - Google Patents
Info
- Publication number
- JPH0322061U JPH0322061U JP8030889U JP8030889U JPH0322061U JP H0322061 U JPH0322061 U JP H0322061U JP 8030889 U JP8030889 U JP 8030889U JP 8030889 U JP8030889 U JP 8030889U JP H0322061 U JPH0322061 U JP H0322061U
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- substrate holder
- thin film
- lamps
- holds
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 8
- 238000001704 evaporation Methods 0.000 claims description 6
- 230000008020 evaporation Effects 0.000 claims description 5
- 239000010409 thin film Substances 0.000 claims description 4
- 238000007740 vapor deposition Methods 0.000 claims description 2
- 238000010438 heat treatment Methods 0.000 claims 1
- 239000010408 film Substances 0.000 description 3
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8030889U JPH0322061U (en]) | 1989-07-07 | 1989-07-07 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8030889U JPH0322061U (en]) | 1989-07-07 | 1989-07-07 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0322061U true JPH0322061U (en]) | 1991-03-06 |
Family
ID=31625250
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8030889U Pending JPH0322061U (en]) | 1989-07-07 | 1989-07-07 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0322061U (en]) |
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1989
- 1989-07-07 JP JP8030889U patent/JPH0322061U/ja active Pending